Microelectromechanical Systems (Q168343)

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Revision as of 20:36, 12 September 2024 by Sky (talk | contribs) (‎Changed label, description and/or aliases in en, and other parts: removed aliases from OpenAlex keywords)
"Study of tiny mechanical devices integrated with electronics on silicon chips."
Language Label Description Also known as
English
Microelectromechanical Systems
"Study of tiny mechanical devices integrated with electronics on silicon chips."

    Statements

    OpenAlex ID
    T10369
    0 references
     
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