Item talk:Q168343

{

 "OpenAlex": {
   "display_name": "Microelectromechanical Systems",
   "description": "This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.",
   "keywords": [
     "Silicon",
     "MEMS",
     "Microfabrication",
     "Resonators",
     "Actuators",
     "Sensors",
     "Reliability",
     "RF switches",
     "Nanomechanical testing",
     "Thermal behavior"
   ],
   "ids": {
     "openalex": "https://openalex.org/T10369",
     "wikipedia": "https://en.wikipedia.org/wiki/Microelectromechanical_systems"
   },
   "subfield": {
     "id": "https://openalex.org/subfields/2208",
     "display_name": "Electrical and Electronic Engineering"
   },
   "field": {
     "id": "https://openalex.org/fields/22",
     "display_name": "Engineering"
   },
   "domain": {
     "id": "https://openalex.org/domains/3",
     "display_name": "Physical Sciences"
   },
   "updated_date": "2024-08-12T05:22:30.132534",
   "created_date": "2024-01-23",
   "type": "topic",
   "oa_id": "T10369",
   "id": "https://openalex.org/T10369"
 }

}