Plasma Physics and Technology in Semiconductor Industry (Q168713)
From geokb
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy di
- Plasma Etching
- Semiconductor Industry
- Atomic Layer Etching
- Hall Thrusters
- Electric Propulsion
- Low Temperature Plasmas
- Electron Energy Distribution Function
- Spacecraft Propulsion
- Ion-Molecule Collisions
- Langmuir Probe
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Plasma Physics and Technology in Semiconductor Industry |
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy di |
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