Atomic Layer Deposition Technology (Q166449)
From geokb
This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices
- Atomic Layer Deposition
- High-k Dielectrics
- Gate Oxides
- Semiconductor Devices
- Nanoelectronics
- Thin Film Growth
- Dielectric Breakdown
- Metal Gate Transistors
- Interface Engineering
- NBTI Degradation
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Atomic Layer Deposition Technology |
This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices |
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