{
"OpenAlex": {
"display_name": "Plasma Physics and Technology in Semiconductor Industry",
"description": "This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.",
"keywords": [
"Plasma Etching",
"Semiconductor Industry",
"Atomic Layer Etching",
"Hall Thrusters",
"Electric Propulsion",
"Low Temperature Plasmas",
"Electron Energy Distribution Function",
"Spacecraft Propulsion",
"Ion-Molecule Collisions",
"Langmuir Probe"
],
"ids": {
"openalex": "https://openalex.org/T10781",
"wikipedia": "https://en.wikipedia.org/wiki/Plasma_physics"
},
"subfield": {
"id": "https://openalex.org/subfields/2208",
"display_name": "Electrical and Electronic Engineering"
},
"field": {
"id": "https://openalex.org/fields/22",
"display_name": "Engineering"
},
"domain": {
"id": "https://openalex.org/domains/3",
"display_name": "Physical Sciences"
},
"updated_date": "2024-08-12T06:05:39.654078",
"created_date": "2024-01-23",
"type": "topic",
"oa_id": "T10781",
"id": "https://openalex.org/T10781"
}
}