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{

 "OpenAlex": {
   "display_name": "Ion Beam Surface Analysis and Nanoscale Patterning",
   "description": "This cluster of papers focuses on the use of ion beam techniques, such as Secondary Ion Mass Spectrometry (SIMS) and swift heavy ions, for surface analysis, nanoscale patterning, and molecular imaging. It covers a wide range of applications including surface engineering, nanostructure fabrication, and depth profiling of biological samples.",
   "keywords": [
     "Ion Beam",
     "Surface Analysis",
     "Secondary Ion Mass Spectrometry",
     "Nanoscale Patterning",
     "Cluster Ion",
     "Time-of-Flight",
     "Molecular Imaging",
     "Swift Heavy Ions",
     "Surface Engineering",
     "Nanostructures"
   ],
   "ids": {
     "openalex": "https://openalex.org/T12166",
     "wikipedia": "https://en.wikipedia.org/wiki/Secondary_ion_mass_spectrometry"
   },
   "subfield": {
     "id": "https://openalex.org/subfields/2206",
     "display_name": "Computational Mechanics"
   },
   "field": {
     "id": "https://openalex.org/fields/22",
     "display_name": "Engineering"
   },
   "domain": {
     "id": "https://openalex.org/domains/3",
     "display_name": "Physical Sciences"
   },
   "updated_date": "2024-08-12T05:56:06.482309",
   "created_date": "2024-01-23",
   "type": "topic",
   "oa_id": "T12166",
   "id": "https://openalex.org/T12166"
 }

}

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