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(Q93464)
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instance of
USGS Open-File Report
1 reference
data source
USGS Publications Warehouse
publication date
1987
1 reference
data source
USGS Publications Warehouse
addresses subject
Chemical Mechanical Polishing in Microelectronics Manufacturing
1 reference
reference URL
https://openalex.org/w2103393947
Characterization of Surface Roughness in Optical Components
1 reference
reference URL
https://openalex.org/w2103393947
Dimensional Metrology and Error Compensation
1 reference
reference URL
https://openalex.org/w2103393947
GDDID
5d4d83f70b45c76cafa421a7
0 references
DOI
10.3133/ofr87618
1 reference
data source
USGS Publications Warehouse
USGS Publications Warehouse IndexID
ofr87618
1 reference
data source
USGS Publications Warehouse
OpenAlex ID
W2103393947
0 references
content URL
https://pubs.usgs.gov/of/1987/0618/report.pdf
1 reference
data source
USGS Publications Warehouse