{
"id": "https://openalex.org/T10472", "display_name": "Atomic Layer Deposition Technology", "description": "This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance.", "keywords": [ "Atomic Layer Deposition", "High-k Dielectrics", "Gate Oxides", "Semiconductor Devices", "Nanoelectronics", "Thin Film Growth", "Dielectric Breakdown", "Metal Gate Transistors", "Interface Engineering", "NBTI Degradation" ], "ids": { "openalex": "https://openalex.org/T10472", "wikipedia": "https://en.wikipedia.org/wiki/Atomic_layer_deposition" }, "subfield": { "id": "https://openalex.org/subfields/2208", "display_name": "Electrical and Electronic Engineering" }, "field": { "id": "https://openalex.org/fields/22", "display_name": "Engineering" }, "domain": { "id": "https://openalex.org/domains/3", "display_name": "Physical Sciences" }, "siblings": [ { "id": "https://openalex.org/T10460", "display_name": "Advances in Lead-free Soldering for Microelectronics" }, { "id": "https://openalex.org/T10504", "display_name": "Analysis of Electric Machinery and Drive Systems" }, { "id": "https://openalex.org/T13420", "display_name": "Applications of Microcontrollers in Various Fields" }, { "id": "https://openalex.org/T11690", "display_name": "Aqueous Zinc-Ion Battery Technology" }, { "id": "https://openalex.org/T12791", "display_name": "Challenges and Opportunities in Full-Duplex Wireless Communication" }, { "id": "https://openalex.org/T11992", "display_name": "CMOS Image Sensor Technology" }, { "id": "https://openalex.org/T11343", "display_name": "Condition Assessment of Power Transformers" }, { "id": "https://openalex.org/T10603", "display_name": "Demand Response in Smart Grids" }, { "id": "https://openalex.org/T13292", "display_name": "Design and Implementation of Embedded Systems" }, { "id": "https://openalex.org/T11522", "display_name": "Design and Optimization of Field-Programmable Gate Arrays and Application-Specific Integrated Circuits" }, { "id": "https://openalex.org/T12737", "display_name": "Detection and Localization of Arc Faults in Electrical Systems" }, { "id": "https://openalex.org/T13440", "display_name": "Effects of Electrically-Assisted Deformation in Metals and Ceramics" }, { "id": "https://openalex.org/T12760", "display_name": "Electric Discharge Pumped Lasers" }, { "id": "https://openalex.org/T13093", "display_name": "Electric Drives and Energy Efficiency in Industry" }, { "id": "https://openalex.org/T10278", "display_name": "Electric Motor Drives for Electric Vehicles" }, { "id": "https://openalex.org/T11451", "display_name": "Electrical Discharge Machining Processes" }, { "id": "https://openalex.org/T11778", "display_name": "Electrical Tomography Techniques" }, { "id": "https://openalex.org/T10424", "display_name": "Electricity Market Operation and Optimization" }, { "id": "https://openalex.org/T11052", "display_name": "Electricity Price and Load Forecasting Methods" }, { "id": "https://openalex.org/T13429", "display_name": "Electricity Theft Detection in Smart Grids" }, { "id": "https://openalex.org/T10212", "display_name": "Electrochemical Biosensor Technology" }, { "id": "https://openalex.org/T11200", "display_name": "Electrodeposition and Composite Coatings" }, { "id": "https://openalex.org/T12776", "display_name": "Electrohydrodynamic Jet Printing and Nanoparticle Encapsulation" }, { "id": "https://openalex.org/T13046", "display_name": "Electrokinetic Soil Remediation Techniques and Applications" }, { "id": "https://openalex.org/T11444", "display_name": "Electromagnetic Compatibility in Electronics" }, { "id": "https://openalex.org/T11338", "display_name": "Electron Beam Lithography: Resolution and Applications" }, { "id": "https://openalex.org/T12495", "display_name": "Electrostatic Discharge Protection in Integrated Circuits" }, { "id": "https://openalex.org/T12452", "display_name": "Electrowetting in Microfluidics and Optics" }, { "id": "https://openalex.org/T11523", "display_name": "Emerging Transparent Electrodes for Flexible Electronics" }, { "id": "https://openalex.org/T12238", "display_name": "Energy Consumption in Mobile Devices and Networks" }, { "id": "https://openalex.org/T14117", "display_name": "Failure Analysis of Integrated Circuits" }, { "id": "https://openalex.org/T11005", "display_name": "Fault Tolerance in Electronic Systems" }, { "id": "https://openalex.org/T12808", "display_name": "Ferroelectric Devices for Low-Power Nanoscale Applications" }, { "id": "https://openalex.org/T10205", "display_name": "Fiber Optic Sensor Technology" }, { "id": "https://openalex.org/T11263", "display_name": "Finite-Difference Time-Domain Methods in Electromagnetics" }, { "id": "https://openalex.org/T10559", "display_name": "Free-Electron Laser Technology" }, { "id": "https://openalex.org/T12300", "display_name": "Frequency Estimation in Electrical Metrology" }, { "id": "https://openalex.org/T10409", "display_name": "Fuel Cell Membrane Technology" }, { "id": "https://openalex.org/T14382", "display_name": "Fundamentals and Applications of Electrophoretic Deposition" }, { "id": "https://openalex.org/T10461", "display_name": "Gas Sensing Technology and Materials" }, { "id": "https://openalex.org/T11637", "display_name": "Infrared Detector Technologies" }, { "id": "https://openalex.org/T14276", "display_name": "Integration and Standardization of Power System Data" }, { "id": "https://openalex.org/T10454", "display_name": "Integration of Distributed Generation in Power Systems" }, { "id": "https://openalex.org/T10768", "display_name": "Integration of Electric Vehicles in Power Systems" }, { "id": "https://openalex.org/T11185", "display_name": "Integration of Renewable Energy Systems in Power Grids" }, { "id": "https://openalex.org/T11458", "display_name": "Intelligent Reflecting Surfaces in Wireless Communications" }, { "id": "https://openalex.org/T13183", "display_name": "Islanding Detection Methods for Distributed Generations" }, { "id": "https://openalex.org/T14158", "display_name": "Laser Technology and Applications" }, { "id": "https://openalex.org/T10281", "display_name": "Lithium Battery Technologies" }, { "id": "https://openalex.org/T10018", "display_name": "Lithium-ion Battery Technology" }, { "id": "https://openalex.org/T12277", "display_name": "Load Frequency Control in Power Systems" }, { "id": "https://openalex.org/T12079", "display_name": "Low Power Wide Area Network Technologies" }, { "id": "https://openalex.org/T10363", "display_name": "Low-Power VLSI Circuit Design and Optimization" }, { "id": "https://openalex.org/T12692", "display_name": "Magnetic Sensor Technology and Applications" }, { "id": "https://openalex.org/T12510", "display_name": "Magneto-Optical Devices for Integrated Photonics" }, { "id": "https://openalex.org/T10502", "display_name": "Memristive Devices for Neuromorphic Computing" }, { "id": "https://openalex.org/T10369", "display_name": "Microelectromechanical Systems" }, { "id": "https://openalex.org/T13436", "display_name": "Microelectronics and Nanotechnologies" }, { "id": "https://openalex.org/T12155", "display_name": "Microwave Dielectric Materials for Communications Applications" }, { "id": "https://openalex.org/T10262", "display_name": "Microwave Engineering and Waveguides" }, { "id": "https://openalex.org/T10767", "display_name": "Microwave Photonics and Optical Access Networks" }, { "id": "https://openalex.org/T11607", "display_name": "Microwave Sensors for Material Characterization and Sensing" }, { "id": "https://openalex.org/T10936", "display_name": "Millimeter Wave Communications for 5G and Beyond" }, { "id": "https://openalex.org/T12163", "display_name": "Modern Electrostatic Gas Cleaning Technologies and Methods" }, { "id": "https://openalex.org/T11102", "display_name": "Modular Multilevel Converters in HVDC Systems" }, { "id": "https://openalex.org/T10913", "display_name": "Molecular Electronic Devices and Systems" }, { "id": "https://openalex.org/T12309", "display_name": "Multijunction Solar Cell Technology" }, { "id": "https://openalex.org/T10228", "display_name": "Multilevel Converters in Power Electronics" }, { "id": "https://openalex.org/T10125", "display_name": "Multiple-Input Multiple-Output Orthogonal Frequency Division Multiplexing" }, { "id": "https://openalex.org/T10558", "display_name": "Nanoelectronics and Transistors" }, { "id": "https://openalex.org/T13251", "display_name": "Negative Temperature Coefficient Resistance (NTCR) Ceramic Thermistors" }, { "id": "https://openalex.org/T10148", "display_name": "Next Generation 5G Wireless Networks" }, { "id": "https://openalex.org/T11797", "display_name": "Optical Code Division Multiple Access" }, { "id": "https://openalex.org/T10847", "display_name": "Optical Communication Networks and Energy Efficiency" }, { "id": "https://openalex.org/T10232", "display_name": "Optical Fiber Communication Technologies" }, { "id": "https://openalex.org/T11429", "display_name": "Optical Interconnect Technologies" }, { "id": "https://openalex.org/T10851", "display_name": "Optical Wireless Communication Systems and Technologies" }, { "id": "https://openalex.org/T14257", "display_name": "Optoelectronic Systems for Measurement and Detection" }, { "id": "https://openalex.org/T10611", "display_name": "Organic Light-Emitting Diodes (OLEDs)" }, { "id": "https://openalex.org/T10045", "display_name": "Organic Solar Cell Technology" }, { "id": "https://openalex.org/T12899", "display_name": "Origins and Applications of Electric Circuits" }, { "id": "https://openalex.org/T11873", "display_name": "Peak-to-Average Power Ratio Reduction Techniques" }, { "id": "https://openalex.org/T10247", "display_name": "Perovskite Solar Cell Technology" }, { "id": "https://openalex.org/T11417", "display_name": "Phase-Locked Loops in High-Speed Circuits" }, { "id": "https://openalex.org/T10846", "display_name": "Photonic Crystal Fiber Technology" }, { "id": "https://openalex.org/T10964", "display_name": "Physical Layer Security in Wireless Communications" }, { "id": "https://openalex.org/T10781", "display_name": "Plasma Physics and Technology in Semiconductor Industry" }, { "id": "https://openalex.org/T10623", "display_name": "Plasmonics for Photovoltaic Devices" }, { "id": "https://openalex.org/T10175", "display_name": "Power Electronics and Conversion Systems" }, { "id": "https://openalex.org/T10361", "display_name": "Power Electronics Technology" }, { "id": "https://openalex.org/T13856", "display_name": "Power Generation and Energy Systems" }, { "id": "https://openalex.org/T12146", "display_name": "Power Line Communications in Smart Grid" }, { "id": "https://openalex.org/T10573", "display_name": "Power Quality Analysis and Mitigation Techniques" }, { "id": "https://openalex.org/T10305", "display_name": "Power System Stability and Control Analysis" }, { "id": "https://openalex.org/T10187", "display_name": "Radio Frequency Integrated Circuit Design" }, { "id": "https://openalex.org/T11851", "display_name": "Reverberation Chambers in Electromagnetic Testing" }, { "id": "https://openalex.org/T11248", "display_name": "RF Power Amplifiers and Predistortion Techniques" }, { "id": "https://openalex.org/T10299", "display_name": "Silicon Photonics Technology" }, { "id": "https://openalex.org/T10624", "display_name": "Silicon Solar Cell Technology" }, { "id": "https://openalex.org/T12451", "display_name": "Smart Grid Technology and Applications" }, { "id": "https://openalex.org/T11127", "display_name": "Solid-State Laser Technology" }, { "id": "https://openalex.org/T13816", "display_name": "Telecommunication Engineering and Network Management" }, { "id": "https://openalex.org/T10752", "display_name": "Terahertz Technology and Applications" }, { "id": "https://openalex.org/T10590", "display_name": "Thin-Film Solar Cell Technology" }, { "id": "https://openalex.org/T11527", "display_name": "Three-Dimensional Integrated Circuits" }, { "id": "https://openalex.org/T14502", "display_name": "Ultra High Voltage Transmission Technology in China" }, { "id": "https://openalex.org/T12024", "display_name": "Ultra-Wideband Communications Technology and Applications" }, { "id": "https://openalex.org/T10761", "display_name": "Vehicular Ad Hoc Networks and Communications" }, { "id": "https://openalex.org/T10740", "display_name": "Wind Power Integration in Power Systems" }, { "id": "https://openalex.org/T11409", "display_name": "Wireless Communication and Network Optimization" }, { "id": "https://openalex.org/T13918", "display_name": "Wireless Communication Technologies" }, { "id": "https://openalex.org/T11392", "display_name": "Wireless Energy Harvesting and Information Transfer" }, { "id": "https://openalex.org/T12222", "display_name": "Wireless Home Automation Systems" }, { "id": "https://openalex.org/T10326", "display_name": "Wireless Indoor Localization Techniques and Systems" }, { "id": "https://openalex.org/T10651", "display_name": "Wireless Mobility and Network Handoff Management" }, { "id": "https://openalex.org/T11249", "display_name": "Wireless Power Transfer Systems and Applications" } ], "works_count": 162670, "cited_by_count": 2165567, "updated_date": "2024-08-26T05:50:11.959526", "created_date": "2024-01-23"
}