Item talk:Q166449
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dictitems: cited_by_count: 2022363 created_date: '2024-01-23' description: This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance. display_name: Atomic Layer Deposition Technology domain: display_name: Physical Sciences id: https://openalex.org/domains/3 field: display_name: Engineering id: https://openalex.org/fields/22 id: https://openalex.org/T10472 ids: openalex: https://openalex.org/T10472 wikipedia: https://en.wikipedia.org/wiki/Atomic_layer_deposition keywords: - Atomic Layer Deposition - High-k Dielectrics - Gate Oxides - Semiconductor Devices - Nanoelectronics - Thin Film Growth - Dielectric Breakdown - Metal Gate Transistors - Interface Engineering - NBTI Degradation siblings: - display_name: Advances in Lead-free Soldering for Microelectronics id: https://openalex.org/T10460 - display_name: Analysis of Electric Machinery and Drive Systems id: https://openalex.org/T10504 - display_name: Applications of Microcontrollers in Various Fields id: https://openalex.org/T13420 - display_name: Aqueous Zinc-Ion Battery Technology id: https://openalex.org/T11690 - display_name: Challenges and Opportunities in Full-Duplex Wireless Communication id: https://openalex.org/T12791 - display_name: CMOS Image Sensor Technology id: https://openalex.org/T11992 - display_name: Condition Assessment of Power Transformers id: https://openalex.org/T11343 - display_name: Demand Response in Smart Grids id: https://openalex.org/T10603 - display_name: Design and Implementation of Embedded Systems id: https://openalex.org/T13292 - display_name: Design and Optimization of Field-Programmable Gate Arrays and Application-Specific Integrated Circuits id: https://openalex.org/T11522 - display_name: Detection and Localization of Arc Faults in Electrical Systems id: https://openalex.org/T12737 - display_name: Effects of Electrically-Assisted Deformation in Metals and Ceramics id: https://openalex.org/T13440 - display_name: Electric Discharge Pumped Lasers id: https://openalex.org/T12760 - display_name: Electric Drives and Energy Efficiency in Industry id: https://openalex.org/T13093 - display_name: Electric Motor Drives for Electric Vehicles id: https://openalex.org/T10278 - display_name: Electrical Discharge Machining Processes id: https://openalex.org/T11451 - display_name: Electrical Tomography Techniques id: https://openalex.org/T11778 - display_name: Electricity Market Operation and Optimization id: https://openalex.org/T10424 - display_name: Electricity Price and Load Forecasting Methods id: https://openalex.org/T11052 - display_name: Electricity Theft Detection in Smart Grids id: https://openalex.org/T13429 - display_name: Electrochemical Biosensor Technology id: https://openalex.org/T10212 - display_name: Electrodeposition and Composite Coatings id: https://openalex.org/T11200 - display_name: Electrohydrodynamic Jet Printing and Nanoparticle Encapsulation id: https://openalex.org/T12776 - display_name: Electrokinetic Soil Remediation Techniques and Applications id: https://openalex.org/T13046 - display_name: Electromagnetic Compatibility in Electronics id: https://openalex.org/T11444 - display_name: 'Electron Beam Lithography: Resolution and Applications' id: https://openalex.org/T11338 - display_name: Electrostatic Discharge Protection in Integrated Circuits id: https://openalex.org/T12495 - display_name: Electrowetting in Microfluidics and Optics id: https://openalex.org/T12452 - display_name: Emerging Transparent Electrodes for Flexible Electronics id: https://openalex.org/T11523 - display_name: Energy Consumption in Mobile Devices and Networks id: https://openalex.org/T12238 - display_name: Failure Analysis of Integrated Circuits id: https://openalex.org/T14117 - display_name: Fault Tolerance in Electronic Systems id: https://openalex.org/T11005 - display_name: Ferroelectric Devices for Low-Power Nanoscale Applications id: https://openalex.org/T12808 - display_name: Fiber Optic Sensor Technology id: https://openalex.org/T10205 - display_name: Finite-Difference Time-Domain Methods in Electromagnetics id: https://openalex.org/T11263 - display_name: Free-Electron Laser Technology id: https://openalex.org/T10559 - display_name: Frequency Estimation in Electrical Metrology id: https://openalex.org/T12300 - display_name: Fuel Cell Membrane Technology id: https://openalex.org/T10409 - display_name: Fundamentals and Applications of Electrophoretic Deposition id: https://openalex.org/T14382 - display_name: Gas Sensing Technology and Materials id: https://openalex.org/T10461 - display_name: Infrared Detector Technologies id: https://openalex.org/T11637 - display_name: Integration and Standardization of Power System Data id: https://openalex.org/T14276 - display_name: Integration of Distributed Generation in Power Systems id: https://openalex.org/T10454 - display_name: Integration of Electric Vehicles in Power Systems id: https://openalex.org/T10768 - display_name: Integration of Renewable Energy Systems in Power Grids id: https://openalex.org/T11185 - display_name: Intelligent Reflecting Surfaces in Wireless Communications id: https://openalex.org/T11458 - display_name: Islanding Detection Methods for Distributed Generations id: https://openalex.org/T13183 - display_name: Laser Technology and Applications id: https://openalex.org/T14158 - display_name: Lithium Battery Technologies id: https://openalex.org/T10281 - display_name: Lithium-ion Battery Technology id: https://openalex.org/T10018 - display_name: Load Frequency Control in Power Systems id: https://openalex.org/T12277 - display_name: Low Power Wide Area Network Technologies id: https://openalex.org/T12079 - display_name: Low-Power VLSI Circuit Design and Optimization id: https://openalex.org/T10363 - display_name: Magnetic Sensor Technology and Applications id: https://openalex.org/T12692 - display_name: Magneto-Optical Devices for Integrated Photonics id: https://openalex.org/T12510 - display_name: Memristive Devices for Neuromorphic Computing id: https://openalex.org/T10502 - display_name: Microelectromechanical Systems id: https://openalex.org/T10369 - display_name: Microelectronics and Nanotechnologies id: https://openalex.org/T13436 - display_name: Microwave Dielectric Materials for Communications Applications id: https://openalex.org/T12155 - display_name: Microwave Engineering and Waveguides id: https://openalex.org/T10262 - display_name: Microwave Photonics and Optical Access Networks id: https://openalex.org/T10767 - display_name: Microwave Sensors for Material Characterization and Sensing id: https://openalex.org/T11607 - display_name: Millimeter Wave Communications for 5G and Beyond id: https://openalex.org/T10936 - display_name: Modern Electrostatic Gas Cleaning Technologies and Methods id: https://openalex.org/T12163 - display_name: Modular Multilevel Converters in HVDC Systems id: https://openalex.org/T11102 - display_name: Molecular Electronic Devices and Systems id: https://openalex.org/T10913 - display_name: Multijunction Solar Cell Technology id: https://openalex.org/T12309 - display_name: Multilevel Converters in Power Electronics id: https://openalex.org/T10228 - display_name: Multiple-Input Multiple-Output Orthogonal Frequency Division Multiplexing id: https://openalex.org/T10125 - display_name: Nanoelectronics and Transistors id: https://openalex.org/T10558 - display_name: Negative Temperature Coefficient Resistance (NTCR) Ceramic Thermistors id: https://openalex.org/T13251 - display_name: Next Generation 5G Wireless Networks id: https://openalex.org/T10148 - display_name: Optical Code Division Multiple Access id: https://openalex.org/T11797 - display_name: Optical Communication Networks and Energy Efficiency id: https://openalex.org/T10847 - display_name: Optical Fiber Communication Technologies id: https://openalex.org/T10232 - display_name: Optical Interconnect Technologies id: https://openalex.org/T11429 - display_name: Optical Wireless Communication Systems and Technologies id: https://openalex.org/T10851 - display_name: Optoelectronic Systems for Measurement and Detection id: https://openalex.org/T14257 - display_name: Organic Light-Emitting Diodes (OLEDs) id: https://openalex.org/T10611 - display_name: Organic Solar Cell Technology id: https://openalex.org/T10045 - display_name: Origins and Applications of Electric Circuits id: https://openalex.org/T12899 - display_name: Peak-to-Average Power Ratio Reduction Techniques id: https://openalex.org/T11873 - display_name: Perovskite Solar Cell Technology id: https://openalex.org/T10247 - display_name: Phase-Locked Loops in High-Speed Circuits id: https://openalex.org/T11417 - display_name: Photonic Crystal Fiber Technology id: https://openalex.org/T10846 - display_name: Physical Layer Security in Wireless Communications id: https://openalex.org/T10964 - display_name: Plasma Physics and Technology in Semiconductor Industry id: https://openalex.org/T10781 - display_name: Plasmonics for Photovoltaic Devices id: https://openalex.org/T10623 - display_name: Power Electronics and Conversion Systems id: https://openalex.org/T10175 - display_name: Power Electronics Technology id: https://openalex.org/T10361 - display_name: Power Generation and Energy Systems id: https://openalex.org/T13856 - display_name: Power Line Communications in Smart Grid id: https://openalex.org/T12146 - display_name: Power Quality Analysis and Mitigation Techniques id: https://openalex.org/T10573 - display_name: Power System Stability and Control Analysis id: https://openalex.org/T10305 - display_name: Radio Frequency Integrated Circuit Design id: https://openalex.org/T10187 - display_name: Reverberation Chambers in Electromagnetic Testing id: https://openalex.org/T11851 - display_name: RF Power Amplifiers and Predistortion Techniques id: https://openalex.org/T11248 - display_name: Silicon Photonics Technology id: https://openalex.org/T10299 - display_name: Silicon Solar Cell Technology id: https://openalex.org/T10624 - display_name: Smart Grid Technology and Applications id: https://openalex.org/T12451 - display_name: Solid-State Laser Technology id: https://openalex.org/T11127 - display_name: Telecommunication Engineering and Network Management id: https://openalex.org/T13816 - display_name: Terahertz Technology and Applications id: https://openalex.org/T10752 - display_name: Thin-Film Solar Cell Technology id: https://openalex.org/T10590 - display_name: Three-Dimensional Integrated Circuits id: https://openalex.org/T11527 - display_name: Ultra High Voltage Transmission Technology in China id: https://openalex.org/T14502 - display_name: Ultra-Wideband Communications Technology and Applications id: https://openalex.org/T12024 - display_name: Vehicular Ad Hoc Networks and Communications id: https://openalex.org/T10761 - display_name: Wind Power Integration in Power Systems id: https://openalex.org/T10740 - display_name: Wireless Communication and Network Optimization id: https://openalex.org/T11409 - display_name: Wireless Communication Technologies id: https://openalex.org/T13918 - display_name: Wireless Energy Harvesting and Information Transfer id: https://openalex.org/T11392 - display_name: Wireless Home Automation Systems id: https://openalex.org/T12222 - display_name: Wireless Indoor Localization Techniques and Systems id: https://openalex.org/T10326 - display_name: Wireless Mobility and Network Handoff Management id: https://openalex.org/T10651 - display_name: Wireless Power Transfer Systems and Applications id: https://openalex.org/T11249 subfield: display_name: Electrical and Electronic Engineering id: https://openalex.org/subfields/2208 updated_date: '2024-05-20T05:05:00.123458' works_count: 161966