Plasma Physics and Technology in Semiconductor Industry (Q168713): Difference between revisions
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Advanced plasma technologies in semiconductor manufacturing and space propulsion. | |||
Revision as of 14:36, 30 August 2024
Advanced plasma technologies in semiconductor manufacturing and space propulsion.
- Plasma Etching
- Semiconductor Industry
- Atomic Layer Etching
- Hall Thrusters
- Electric Propulsion
- Low Temperature Plasmas
- Electron Energy Distribution Function
- Spacecraft Propulsion
- Ion-Molecule Collisions
- Langmuir Probe
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Plasma Physics and Technology in Semiconductor Industry |
Advanced plasma technologies in semiconductor manufacturing and space propulsion. |
|
